Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770151 | Drying a substrate using a combination of substrate processing technologies | Michael Ravkin, Katrina Mikhaylichenko | 2004-08-03 |
| 6729339 | Method and apparatus for cooling a resonator of a megasonic transducer | John M. Boyd, Carl Woods | 2004-05-04 |