Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6729339 | Method and apparatus for cooling a resonator of a megasonic transducer | John M. Boyd, John deLarios | 2004-05-04 |
| 6702202 | Method and apparatus for fluid delivery to a backside of a substrate | John M. Boyd | 2004-03-09 |