Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770151 | Drying a substrate using a combination of substrate processing technologies | Katrina Mikhaylichenko, John deLarios | 2004-08-03 |
| 6733596 | Substrate cleaning brush preparation sequence, method, and system | Katrina Mikhaylichenko | 2004-05-11 |