Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780278 | Plasma processing apparatus with reduced parasitic capacity and loss in RF power | Hisataka Hayashi, Itsuko Sakai, Tokuhisa Ohiwa, Akihiro Kojima | 2004-08-24 |
| 6762064 | Process for fabrication of a ferrocapacitor | Haoren Zhuang, Ulrich Egger | 2004-07-13 |