Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780278 | Plasma processing apparatus with reduced parasitic capacity and loss in RF power | Hisataka Hayashi, Kazuhiro Tomioka, Itsuko Sakai, Tokuhisa Ohiwa | 2004-08-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780278 | Plasma processing apparatus with reduced parasitic capacity and loss in RF power | Hisataka Hayashi, Kazuhiro Tomioka, Itsuko Sakai, Tokuhisa Ohiwa | 2004-08-24 |