Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794286 | Process for fabricating a metal wiring and metal contact in a semicondutor device | Hisako Aoyama, Kyoichi Suguro, Hiromi Niiyama, Hitoshi Tamura, Tomonori Aoyama +2 more | 2004-09-21 |
| 6780278 | Plasma processing apparatus with reduced parasitic capacity and loss in RF power | Kazuhiro Tomioka, Itsuko Sakai, Tokuhisa Ohiwa, Akihiro Kojima | 2004-08-24 |