Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6782907 | Gas recirculation flow control method and apparatus for use in vacuum system | Hiroyuki Kawasaki, Tokuhisa Ohiwa | 2004-08-31 |
| 6780278 | Plasma processing apparatus with reduced parasitic capacity and loss in RF power | Hisataka Hayashi, Kazuhiro Tomioka, Tokuhisa Ohiwa, Akihiro Kojima | 2004-08-24 |
| 6689699 | Method for manufacturing a semiconductor device using recirculation of a process gas | Takayuki Sakai, Tokuhisa Ohiwa | 2004-02-10 |