Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6783634 | Manufacturing method and apparatus of phase shift mask blank | Hideaki Mitsui | 2004-08-31 |
| 6762000 | Phase shift mask blank, photo mask blank and manufacturing apparatus and method of blanks | Masaru Mitsui, Hitoshi Ootsuka, Hideaki Mitsui | 2004-07-13 |
| 6746806 | Lithography mask blank and method of manufacturing the same | — | 2004-06-08 |
| 6743553 | Halftone phase shift mask and mask blank | Yuki Shiota | 2004-06-01 |
| 6740208 | Photo mask blank and method of manufacturing the same | Mitsuhiro Kureishi | 2004-05-25 |
| 6723477 | Method for manufacturing phase shift mask blank and method for manufacturing phase shift mask | Masaru Mitsui, Hideaki Mitsui | 2004-04-20 |
| 6677087 | Phase shift mask blank, phase shift mask, and method for manufacturing the same | Hideaki Mitsui | 2004-01-13 |