Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6783634 | Manufacturing method and apparatus of phase shift mask blank | Osamu Nozawa | 2004-08-31 |
| 6762000 | Phase shift mask blank, photo mask blank and manufacturing apparatus and method of blanks | Osamu Nozawa, Masaru Mitsui, Hitoshi Ootsuka | 2004-07-13 |
| 6723477 | Method for manufacturing phase shift mask blank and method for manufacturing phase shift mask | Osamu Nozawa, Masaru Mitsui | 2004-04-20 |
| 6677087 | Phase shift mask blank, phase shift mask, and method for manufacturing the same | Osamu Nozawa | 2004-01-13 |