Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6762000 | Phase shift mask blank, photo mask blank and manufacturing apparatus and method of blanks | Osamu Nozawa, Masaru Mitsui, Hideaki Mitsui | 2004-07-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6762000 | Phase shift mask blank, photo mask blank and manufacturing apparatus and method of blanks | Osamu Nozawa, Masaru Mitsui, Hideaki Mitsui | 2004-07-13 |