Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6762000 | Phase shift mask blank, photo mask blank and manufacturing apparatus and method of blanks | Osamu Nozawa, Hitoshi Ootsuka, Hideaki Mitsui | 2004-07-13 |
| 6723477 | Method for manufacturing phase shift mask blank and method for manufacturing phase shift mask | Osamu Nozawa, Hideaki Mitsui | 2004-04-20 |