Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6759666 | Method and apparatus for charged particle beam exposure | Koji Nagata, Haruo Yoda, Hiroyuki Takahashi | 2004-07-06 |
| 6750000 | Electron device manufacturing method, a pattern forming method, and a photomask used for those methods | Toshihiko Tanaka, Norio Hasegawa, Hiroshi Shiraishi | 2004-06-15 |
| 6703171 | Photomask, the manufacturing method, a patterning method, and a semiconductor device manufacturing method | Takashi Hattori, Yasuko Gotoh, Toshihiko Tanaka, Hiroshi Shiraishi | 2004-03-09 |