Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831283 | Charged particle beam drawing apparatus and pattern forming method | Hajime Kawano | 2004-12-14 |
| 6828573 | Electron beam lithography system | Hajime Kawano, Minoru Wakita, Masato Kamada | 2004-12-07 |
| 6759666 | Method and apparatus for charged particle beam exposure | Koji Nagata, Hidetoshi Satoh, Hiroyuki Takahashi | 2004-07-06 |
| 6674086 | Electron beam lithography system, electron beam lithography apparatus, and method of lithography | Masato Kamada, Minoru Wakita, Hajime Kawano | 2004-01-06 |