Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828573 | Electron beam lithography system | Hajime Kawano, Masato Kamada, Haruo Yoda | 2004-12-07 |
| 6674086 | Electron beam lithography system, electron beam lithography apparatus, and method of lithography | Masato Kamada, Haruo Yoda, Hajime Kawano | 2004-01-06 |