Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800423 | Radiation-sensitive composition and method for forming patterns and fabricating semiconductor devices | Yoshiyuki Yokoyama | 2004-10-05 |
| 6780781 | Method for manufacturing an electronic device | Takahiro Odaka, Toshihiko Tanaka, Hiroshi Fukuda | 2004-08-24 |
| 6703171 | Photomask, the manufacturing method, a patterning method, and a semiconductor device manufacturing method | Yasuko Gotoh, Hidetoshi Satoh, Toshihiko Tanaka, Hiroshi Shiraishi | 2004-03-09 |
| 6703328 | Semiconductor device manufacturing method | Toshihiko Tanaka | 2004-03-09 |