Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828570 | Technique for writing with a raster scanned beam | Stephen A. Rishton, Stacey Winter, Volker Boegli, Huei Kao | 2004-12-07 |
| 6803572 | Apparatus and methods for secondary electron emission microscope with dual beam | David L. Adler | 2004-10-12 |
| 6768117 | Immersion lens with magnetic shield for charged particle beam system | William J. DeVore | 2004-07-27 |
| 6720565 | Real-time prediction of and correction of proximity resist heating in raster scan particle beam lithography | Robert A. Innes, Sergey Babin, Robin L. Teitzel | 2004-04-13 |