Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812461 | Photocathode source for e-beam inspection or review | Marian Mankos | 2004-11-02 |
| 6803571 | Method and apparatus for dual-energy e-beam inspector | Marian Mankos | 2004-10-12 |
| 6803572 | Apparatus and methods for secondary electron emission microscope with dual beam | Lee H. Veneklasen | 2004-10-12 |
| 6797955 | Filtered e-beam inspection and review | Luca Grella, Gabor Toth | 2004-09-28 |
| 6771806 | Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices | Akella V. S. Satya, Bin-Ming Benjamin Tsai, David J. Walker | 2004-08-03 |
| 6713759 | Apparatus and method for secondary electron emission microscope | David J. Walker, Fred Babian, Travis Wolfe | 2004-03-30 |
| 6690010 | Chemical analysis of defects using electron appearance spectroscopy | — | 2004-02-10 |