Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828996 | Electron beam patterning with a heated electron source | Glen E. Howard | 2004-12-07 |
| 6768117 | Immersion lens with magnetic shield for charged particle beam system | Lee H. Veneklasen | 2004-07-27 |