Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6720565 | Real-time prediction of and correction of proximity resist heating in raster scan particle beam lithography | Robert A. Innes, Robin L. Teitzel, Lee H. Veneklasen | 2004-04-13 |