Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824454 | Polishing apparatus | Tadakazu Sone | 2004-11-30 |
| 6764381 | Polishing apparatus | Hideji Isobe, Kazuo Shimizu, Hiroyuki Osawa | 2004-07-20 |
| 6752692 | Cleaning method and polishing apparatus employing such cleaning method | Yutaka Wada, Hirokuni Hiyama | 2004-06-22 |
| 6729946 | Polishing apparatus | — | 2004-05-04 |
| 6722964 | Polishing apparatus and method | Mitsuhiko Shirakashi, Katsuya Okumura, You Ishii, Junji Kunisawa, Hiroyuki Yano | 2004-04-20 |
| 6716330 | Electroless plating apparatus and method | Akihisa Hongo, Koji Mishima, Hiroaki Inoue, Tsutomu Karimata | 2004-04-06 |
| 6689257 | Substrate processing apparatus and substrate plating apparatus | Koji Mishima, Junji Kunisawa, Natsuki Makino, Hiroaki Inoue, Kenji Nakamura +3 more | 2004-02-10 |