Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6752692 | Cleaning method and polishing apparatus employing such cleaning method | Yutaka Wada, Norio Kimura | 2004-06-22 |
| 6712678 | Polishing-product discharging device and polishing device | Yutaka Wada, Kazuto Hirokawa, Hisanori Matsuo | 2004-03-30 |
| 6672945 | Polishing apparatus and dressing method | Hisanori Matsuo, Yutaka Wada, Kazuto Hirokawa | 2004-01-06 |