Issued Patents 2004
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6801560 | Line selected F2 two chamber laser system | David S. Knowles, Daniel J. W. Brown, Richard L. Sandstrom, German E. Rylov, Eckehard D. Onkels +8 more | 2004-10-05 |
| 6778584 | High power gas discharge laser with helium purged line narrowing unit | William N. Partlo, Richard L. Sandstrom, Raymond F. Cybulski, Igor V. Fomenkov | 2004-08-17 |
| 6738410 | Line narrowed laser with bidirection beam expansion | William N. Partlo, Scott T. Smith | 2004-05-18 |
| 6735236 | High power gas discharge laser with line narrowing unit | Raymond F. Cybulski, Eckehard D. Onkels, Palash P. Das, Danilo K. Richardson, Jesse Buck | 2004-05-11 |
| 6713770 | High resolution spectral measurement device | Richard L. Sandstrom, William N. Partlo, Igor V. Fomenkov, Scott T. Smith, Daniel J. W. Brown | 2004-03-30 |
| 6704340 | Lithography laser system with in-place alignment tool | William N. Partlo, Palash P. Das, Laura S. Casas, Daniel J. W. Brown | 2004-03-09 |
| 6704339 | Lithography laser with beam delivery and beam pointing control | Leonard Lublin, David J. Warkentin, Palash P. Das, Brian Klene, R. Kyle Webb +4 more | 2004-03-09 |
| 6693939 | Laser lithography light source with beam delivery | Brian Klene, Palash P. Das, Steve Grove, Scot Smith, Xiaojiang Pan +1 more | 2004-02-17 |
| 6690704 | Control system for a two chamber gas discharge laser | John P. Fallon, Richard L. Sandstrom, William N. Partlo, Toshihiko Ishihara, John Meisner +4 more | 2004-02-10 |