Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6751033 | Closed-loop focal positioning system and method | Peter Goldstein, Carlos G. Suarez, Scott A. Delong, Tibor Juhasz | 2004-06-15 |
| 6704339 | Lithography laser with beam delivery and beam pointing control | Leonard Lublin, David J. Warkentin, Palash P. Das, Brian Klene, Herve A. Besaucele +4 more | 2004-03-09 |