Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6704339 | Lithography laser with beam delivery and beam pointing control | Leonard Lublin, David J. Warkentin, Palash P. Das, R. Kyle Webb, Herve A. Besaucele +4 more | 2004-03-09 |
| 6693939 | Laser lithography light source with beam delivery | Palash P. Das, Steve Grove, Alexander I. Ershov, Scot Smith, Xiaojiang Pan +1 more | 2004-02-17 |