Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6801560 | Line selected F2 two chamber laser system | David S. Knowles, Richard L. Sandstrom, German E. Rylov, Eckehard D. Onkels, Herve A. Besaucele +8 more | 2004-10-05 |
| 6713770 | High resolution spectral measurement device | Richard L. Sandstrom, Alexander I. Ershov, William N. Partlo, Igor V. Fomenkov, Scott T. Smith | 2004-03-30 |
| 6704340 | Lithography laser system with in-place alignment tool | Alexander I. Ershov, William N. Partlo, Palash P. Das, Laura S. Casas | 2004-03-09 |