Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6813796 | Apparatus and methods to clean copper contamination on wafer edge | Sudipto Ranendra Roy, Subhash Gupta, Simon Chooi, Yakub Aliyu, Mei Sheng Zhou +2 more | 2004-11-09 |
| 6730591 | Method of using silicon rich carbide as a barrier material for fluorinated materials | Licheng M. Han, Simon Chooi, Mei Sheng Zhou, Joseph Xie | 2004-05-04 |