Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811816 | Method and apparatus for forming deposition film, and method for treating substrate | Hideo Tamura, Masahiro Kanai, Hiroshi Shimoda, Hidetoshi Tsuzuki | 2004-11-02 |
| 6783640 | Sputtering method and sputtering apparatus | Toshihiro Yamashita, Hiroshi Echizen, Hidetoshi Tsuzuki | 2004-08-31 |
| 6716324 | Method of forming transparent, conductive film, method of compensating defective region of semiconductor layer, photovoltaic element, and method of producing photovoltaic element | Toshihiro Yamashita, Hiroshi Izawa | 2004-04-06 |
| 6694792 | Substrate treatment process | Masatoshi Tanaka, Hirokazu Ohtoshi | 2004-02-24 |