Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833155 | Apparatus and method for processing a substrate | Masahiro Kanai, Hirokazu Ohtoshi, Tadashi Hori, Koichiro Moriyama | 2004-12-21 |
| 6811816 | Method and apparatus for forming deposition film, and method for treating substrate | Hideo Tamura, Masahiro Kanai, Yasuyoshi Takai, Hidetoshi Tsuzuki | 2004-11-02 |
| 6797316 | Process for producing a coating film and process for producing a solid polymer electrolyte fuel cell | Shinji Kinoshita, Atsushi Mukoyama | 2004-09-28 |
| 6692858 | Electrolyte membrane for polymer electrolyte fuel cell and producing method thereof | Yoshiaki Higuchi, Ichiro Terada, Satoru Hommura | 2004-02-17 |