Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811816 | Method and apparatus for forming deposition film, and method for treating substrate | Hideo Tamura, Masahiro Kanai, Yasuyoshi Takai, Hiroshi Shimoda | 2004-11-02 |
| 6783640 | Sputtering method and sputtering apparatus | Toshihiro Yamashita, Hiroshi Echizen, Yasuyoshi Takai | 2004-08-31 |
| 6703555 | Solar cell string, solar cell array and solar photovoltaic power system | Akiharu Takabayashi, Hidehisa Makita, Masaaki Matsushita, Takaaki Mukai, Shigenori Itoyama | 2004-03-09 |