Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6783640 | Sputtering method and sputtering apparatus | Hiroshi Echizen, Yasuyoshi Takai, Hidetoshi Tsuzuki | 2004-08-31 |
| 6740210 | Sputtering method for forming film and apparatus therefor | Hiroshi Echizen | 2004-05-25 |
| 6716324 | Method of forming transparent, conductive film, method of compensating defective region of semiconductor layer, photovoltaic element, and method of producing photovoltaic element | Yasuyoshi Takai, Hiroshi Izawa | 2004-04-06 |
| 6677171 | Manufacturing method of collective substrate of active-matrix substrates, manufacturing method of active-matrix substrates, and inspecting method of collective substrates of active-matrix substrates | Hisashi Nagata, Mikio Katayama, Manabu Takahama | 2004-01-13 |