Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812499 | Silicon-based film and photovoltaic element | Makoto Higashikawa, Masafumi Sano, Koichi Matsuda | 2004-11-02 |
| 6803080 | Method of forming crystalline silicon film by CVD | Masafumi Sano, Koichi Matsuda, Makoto Higashikawa | 2004-10-12 |
| 6794275 | Process for forming a silicon-based film on a substrate using a temperature gradient across the substrate axis | Shotaro Okabe, Masafumi Sano, Akira Sakai, Yuzo Koda, Ryo Hayashi +2 more | 2004-09-21 |
| 6737123 | Silicon-based film formation process, silicon-based film, semiconductor device, and silicon-based film formation system | Masafumi Sano, Akira Sakai, Tadashi Sawayama, Ryo Hayashi, Shuichiro Sugiyama +2 more | 2004-05-18 |
| 6706335 | Method of forming silicon-based thin film | Koichi Matsuda, Makoto Higashikawa | 2004-03-16 |
| 6706336 | Silicon-based film, formation method therefor and photovoltaic element | Masafumi Sano, Koichi Matsuda, Makoto Higashikawa | 2004-03-16 |