Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800539 | Thin film formation method | Takahiro Yajima, Masahiro Kanai | 2004-10-05 |
| 6794275 | Process for forming a silicon-based film on a substrate using a temperature gradient across the substrate axis | Takaharu Kondo, Shotaro Okabe, Masafumi Sano, Akira Sakai, Yuzo Koda +2 more | 2004-09-21 |
| 6737123 | Silicon-based film formation process, silicon-based film, semiconductor device, and silicon-based film formation system | Takaharu Kondo, Masafumi Sano, Akira Sakai, Tadashi Sawayama, Ryo Hayashi +2 more | 2004-05-18 |