Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794275 | Process for forming a silicon-based film on a substrate using a temperature gradient across the substrate axis | Takaharu Kondo, Shotaro Okabe, Masafumi Sano, Akira Sakai, Ryo Hayashi +2 more | 2004-09-21 |