Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6737123 | Silicon-based film formation process, silicon-based film, semiconductor device, and silicon-based film formation system | Takaharu Kondo, Masafumi Sano, Akira Sakai, Ryo Hayashi, Shuichiro Sugiyama +2 more | 2004-05-18 |