Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6836531 | X-ray projection exposure apparatus and a device manufacturing method | Masami Tsukamoto | 2004-12-28 |
| 6804323 | Mask pattern magnification correction method, magnification correction apparatus, and mask structure | Akira Moriya, Takeshi Miyachi, Toshinobu Tokita | 2004-10-12 |
| 6750946 | Processing apparatus for processing sample in predetermined atmosphere | Yutaka Tanaka, Shigeru Terashima | 2004-06-15 |
| 6728332 | X-ray mask, and exposure method and apparatus using the same | Keiko Chiba, Masami Tsukamoto, Yutaka Watanabe, Hiroshi Maehara | 2004-04-27 |
| 6714277 | Exposure apparatus, gas replacement method, semiconductor device manufacturing method, semiconductor manufacturing factory and exposure apparatus maintenance method | Yutaka Tanaka, Kazuyuki Kasumi, Toru Hirabayashi | 2004-03-30 |