Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829091 | Optical system and optical instrument with diffractive optical element | Takashi Kato, Kenji Saitoh, Makoto Ogusu, Keiko Chiba | 2004-12-07 |
| 6795166 | Illuminator, exposure apparatus, and method for fabricating device using the same | Hideo Kato | 2004-09-21 |
| 6728332 | X-ray mask, and exposure method and apparatus using the same | Keiko Chiba, Masami Tsukamoto, Yutaka Watanabe, Shinichi Hara | 2004-04-27 |