Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6829091 | Optical system and optical instrument with diffractive optical element | Takashi Kato, Kenji Saitoh, Hiroshi Maehara, Makoto Ogusu | 2004-12-07 |
| 6728332 | X-ray mask, and exposure method and apparatus using the same | Masami Tsukamoto, Yutaka Watanabe, Shinichi Hara, Hiroshi Maehara | 2004-04-27 |
| 6723475 | Reflection-type mask for use in pattern exposure, manufacturing method therefor, exposure apparatus, and method of manufacturing a device | Masami Tsukamoto | 2004-04-20 |