Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6836316 | Substrate holding apparatus and exposure apparatus using the same | — | 2004-12-28 |
| 6804323 | Mask pattern magnification correction method, magnification correction apparatus, and mask structure | Akira Moriya, Takeshi Miyachi, Shinichi Hara | 2004-10-12 |