Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6803168 | Composition for anti-reflective coating or radiation absorbing coating and compounds used in the composition | Wen-Bing Kang, Hatsuyuki Tanaka, Ken Kimura, Georg Pawlowski | 2004-10-12 |
| 6800416 | Negative deep ultraviolet photoresist | Takanori Kudo, Ralph R. Dammel, Medhat A. Touky | 2004-10-05 |
| 6737492 | Radiation absorbing polymer, composition for radiation absorbing coating, radiation absorbing coating and application thereof as anti-reflective coating | Wen-Bing Kang, Hatsuyuki Tanaka, Ken Kimura, Takanori Kudo, Georg Pawlowski | 2004-05-18 |
| 6723488 | Photoresist composition for deep UV radiation containing an additive | Takanori Kudo, Ralph R. Dammel | 2004-04-20 |