Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6803168 | Composition for anti-reflective coating or radiation absorbing coating and compounds used in the composition | Munirathna Padmanaban, Wen-Bing Kang, Hatsuyuki Tanaka, Ken Kimura | 2004-10-12 |
| 6737492 | Radiation absorbing polymer, composition for radiation absorbing coating, radiation absorbing coating and application thereof as anti-reflective coating | Wen-Bing Kang, Munirathna Padmanaban, Hatsuyuki Tanaka, Ken Kimura, Takanori Kudo | 2004-05-18 |
| 6686121 | Process for preparing resists | Hiroshi Okazaki, Satoru Funato, Yoshiaki Kinoshita, Yuko Yamaguchi | 2004-02-03 |