Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6793733 | Gas distribution showerhead | Karthik Janakiraman, Nitin K. Ingle, Steven Gianoulakis | 2004-09-21 |
| 6763501 | Remote document serving | Min Zhu, Guanghong Yang, Song Wei | 2004-07-13 |
| 6691154 | Instantaneous remote control of an unattended server | Min Zhu | 2004-02-10 |
| 6677247 | Method of increasing the etch selectivity of a contact sidewall to a preclean etchant | Steve Ghanayem, Randhir P. S. Thakur | 2004-01-13 |