Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830624 | Blocker plate by-pass for remote plasma clean | Edwin C. Suarez | 2004-12-14 |
| 6793733 | Gas distribution showerhead | Nitin K. Ingle, Zheng Yuan, Steven Gianoulakis | 2004-09-21 |