Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6677247 | Method of increasing the etch selectivity of a contact sidewall to a preclean etchant | Zheng Yuan, Randhir P. S. Thakur | 2004-01-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6677247 | Method of increasing the etch selectivity of a contact sidewall to a preclean etchant | Zheng Yuan, Randhir P. S. Thakur | 2004-01-13 |