Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818604 | System and method for cleaning workpieces | Ismail Emesh, Yakov Epshteyn, Guangshum Chen, Xingbo Yang | 2004-11-16 |
| 6802955 | Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface | Ismail Emesh, Phillip M. Rayer, II, Bentley J. Palmer | 2004-10-12 |
| 6685537 | Polishing pad window for a chemical mechanical polishing tool | Clinton O. Fruitman, Mark Meloni, Andrew Michael Yednak, III | 2004-02-03 |