Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818604 | System and method for cleaning workpieces | Yakov Epshteyn, Periya Gopalan, Guangshum Chen, Xingbo Yang | 2004-11-16 |
| 6802955 | Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface | Periya Gopalan, Phillip M. Rayer, II, Bentley J. Palmer | 2004-10-12 |
| 6736952 | Method and apparatus for electrochemical planarization of a workpiece | Saket Chadda, Nikolay Korovin, Brian L. Mueller | 2004-05-18 |