Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6736952 | Method and apparatus for electrochemical planarization of a workpiece | Ismail Emesh, Saket Chadda, Nikolay Korovin | 2004-05-18 |
| 6726534 | Preequilibrium polishing method and system | Gregory Bogush, Jeffrey P. Chamberlain, Paul M. Feeney, David Schroeder, Alicia Walters | 2004-04-27 |
| 6716755 | Composition and method for planarizing surfaces | Mingming Fang, James A. Dirksen | 2004-04-06 |
| 6689692 | Composition for oxide CMP | Gautam S. Grover, Shumin Wang | 2004-02-10 |