Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821897 | Method for copper CMP using polymeric complexing agents | Phillip W. Carter, Jeffrey P. Chamberlain, Kyle Miller, Isaac K. Cherian | 2004-11-23 |
| 6726534 | Preequilibrium polishing method and system | Gregory Bogush, Jeffrey P. Chamberlain, Paul M. Feeney, Brian L. Mueller, Alicia Walters | 2004-04-27 |