Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818604 | System and method for cleaning workpieces | Ismail Emesh, Periya Gopalan, Guangshum Chen, Xingbo Yang | 2004-11-16 |
| 6678911 | Multiple vertical wafer cleaner | Frank Krupa, Ellis Harvey | 2004-01-20 |