Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805613 | Multiprobe detection system for chemical-mechanical planarization tool | Matthew Weldon, Thomas Laursen, Malcolm Grief, Paul Holzapfel, Robert A. Eaton | 2004-10-19 |
| 6685537 | Polishing pad window for a chemical mechanical polishing tool | Clinton O. Fruitman, Periya Gopalan, Andrew Michael Yednak, III | 2004-02-03 |