Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821794 | Flexible snapshot in endpoint detection | Mamoru Yamayoshi | 2004-11-23 |
| 6805613 | Multiprobe detection system for chemical-mechanical planarization tool | Matthew Weldon, Malcolm Grief, Paul Holzapfel, Mark Meloni, Robert A. Eaton | 2004-10-19 |